Extinction of RF capacitive low-pressure discharges

dc.contributor.author	Lisovskiy, Valeriy
dc.contributor.author	Booth, Jean-Paul
dc.contributor.author	Martins, Sofia
dc.contributor.author	Landry, Karine
dc.contributor.author	Douai, David
dc.contributor.author	Cassagne, Valerick
dc.date.accessioned	2010-11-17T20:58:45Z
dc.date.available	2010-11-17T20:58:45Z
dc.date.issued	2005-08
dc.description.abstract	Breakdown and extinction curves have been measured for RF capacitive low-pressure discharges in nitrogen and hydrogen at a frequency of 13.56 MHz and discharge gaps between 6 and 25 mm. In particular, the low-pressure, high-voltage region of the extinction curves is reported for the first time. The shape of the extinction curves was found to be similar to that of the breakdown curves. At sufficiently large gaps (L > 10 mm) the RF extinction voltage was found to be multi-valued in the low-pressure region, as is observed for the breakdown voltage. In this region, extinction can occur when the voltage is increased because the width of the two sheaths occupies the whole discharge space.	en
dc.description.sponsorship	-	en
dc.identifier.citation	Europhys. Lett., 71 (3), pp. 407–411 (2005)	en
dc.identifier.uri	https://ekhnuir.karazin.ua/handle/123456789/1710
dc.language.iso	en	en
dc.publisher	EUROPHYSICS LETTERS	en
dc.relation.ispartofseries	;DOI: 10.1209/epl/i2005-10108-1
dc.subject	plasma physics	en
dc.subject	gas discharges	en
dc.title	Extinction of RF capacitive low-pressure discharges	en
dc.type	Article	en

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