Electron-drift velocity determination  in CF4 and SF6 in a strong electric  field from breakdown curves of  low-pressure RF discharge

dc.contributor.author	Lisovskiy, V.
dc.contributor.author	Yegorenkov, V.
dc.date.accessioned	2010-11-19T21:29:50Z
dc.date.available	2010-11-19T21:29:50Z
dc.date.issued	1999-10
dc.description.abstract	In this paper we report the values of the electron-drift velocity in CF4 and SF6 within the range E/p = 200–1000 V cm−1 Torr−1. We have used the recorded coordinates of the turning point on the breakdown curves of the rf capacitive discharge. We have also formulated the main requirements to the experimental device for correct recording of the breakdown curves of the low-pressure rf capacitive discharge. Our data are in good agreement with those of other authors who have used different approaches. We have also obtained the results on the electron-drift-velocity values within the E=p region where no other techniques are applicable. Our findings are also supported by numerical simulation data obtained with the application of a conventional Bolsig code.	en
dc.description.sponsorship	-	en
dc.identifier.citation	J. Phys. D: Appl. Phys. 32 (1999) 2645–2648.	en
dc.identifier.uri	https://ekhnuir.karazin.ua/handle/123456789/1731
dc.language.iso	en	en
dc.publisher	JOURNAL OF PHYSICS D: APPLIED PHYSICS	en
dc.relation.ispartofseries	;PII: S0022-3727(99)04542-8
dc.subject	plasma physics	en
dc.subject	gas discharges	en
dc.title	Electron-drift velocity determination in CF4 and SF6 in a strong electric field from breakdown curves of low-pressure RF discharge	en
dc.type	Article	en

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