Modes and the alpha-gamma transition in rf capacitive discharges in N2O at different rf frequencies

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dc.contributor.authorLisovskiy, V.
dc.contributor.authorBooth, Jean-Paul
dc.contributor.authorLandry, K.
dc.contributor.authorDouai, D.
dc.contributor.authorCassagne, V.
dc.contributor.authorYegorenkov, V.
dc.date.accessioned2010-11-17T20:25:03Z
dc.date.available2010-11-17T20:25:03Z
dc.date.issued2006-10
dc.description.abstractThis paper reports current-voltage characteristics and pressure-voltage transition curves from the weak-current a-mode to the strong-current g-mode for rf capacitive discharges in N2O at frequencies of 2 MHz, 13.56 MHz, and 27.12 MHz. At 2 MHz the rf discharge is mostly resistive whereas at 13.56 MHz and 27.12 MHz it is mostly capacitive. The weak-current a-mode was found to exist only above a certain minimum gas pressure for all frequencies studied [N. Yatsenko Sov. Phys. Tech. Phys. 26, 678 (19810] previously proposed that the a−g transition corresponds to breakdown of the sheaths. However, we show that this is the case only for sufficiently high gas pressures. At lower pressure there is a smooth transition from the weak-current a-mode to a strong-current g-mode, in which the sheaths produce fast electrons but the sheath has not undergone breakdown.en
dc.description.sponsorship-en
dc.identifier.citationPHYSICS OF PLASMAS 13, 103505 (2006)en
dc.identifier.urihttps://ekhnuir.karazin.ua/handle/123456789/1704
dc.language.isoenen
dc.publisherPHYSICS OF PLASMASen
dc.relation.ispartofseries;DOI: 10.1063/1.2364135
dc.subjectplasma physicsen
dc.subjectgas dischargesen
dc.titleModes and the alpha-gamma transition in rf capacitive discharges in N2O at different rf frequenciesen
dc.typeArticleen

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