Low-pressure gas breakdown in longitudinal combined electric fields
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Дата
2010-10
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Видавець
JOURNAL OF PHYSICS D: APPLIED PHYSICS
Анотація
This paper contains the complete experimental and analytical picture of gas breakdown in combined electric fields for arbitrary values of rf and dc fields. To obtain it, we continued the study of the discharge ignition modes in nitrogen with simultaneous application of dc and rf electric fields presented in Lisovskiy et al (2008 J. Phys. D: Appl. Phys. 41 125207). To this end, we studied the effect of rf voltage on dc discharge ignition. When we applied an rf voltage exceeding the one corresponding to the minimum breakdown voltage of a self-sustained rf discharge, the curve of dependence of the dc breakdown voltage of a combined discharge on gas pressure was found to consist of two sections. We got the generalized gas breakdown criterion in the combined field valid for arbitrary values of rf and dc electric fields. The calculation results agree with experimental data satisfactorily.
Опис
Ключові слова
plasma physics, gas discharges
Бібліографічний опис
doi:10.1088/0022-3727/43/42/425202