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Please use this identifier to cite or link to this item: http://dspace.univer.kharkov.ua/handle/123456789/1712

Название: Alpha–gamma transition in RF capacitive discharge in low-pressure oxygen
Авторы: Lisovskiy, V.
Yegorenkov, V.
Ключевые слова: plasma physics
gas discharges
Issue Date: Jan-2004
Издатель: www.elsevier.com/locate/vacuum
Библиографическое описание: Vacuum 74 (2004) 19–28
Серия/номер: ;doi:10.1016/j.vacuum.2003.11.003
Краткий осмотр (реферат): We report the recorded current–voltage characteristics of a RF capacitive discharge in oxygen. Low-frequency oscillations of the plasma potential in a kilohertz frequency range are observed to accompany the transition of the discharge from a weak- (a-) to a strong-current (g-) regime in the low-pressure range. The weak-current regime of the RF capacitive discharge is observed within the pressure range limited not only from the medium pressure side but also from the lower-pressure one. Electron temperature and plasma density are registered with a probe technique.
URI: http://dspace.univer.kharkov.ua/handle/123456789/1712
Appears in Collections:Наукові роботи. Фізико-технічний факультет

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