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Please use this identifier to cite or link to this item: http://dspace.univer.kharkov.ua/handle/123456789/1710

Название: Extinction of RF capacitive low-pressure discharges
Авторы: Lisovskiy, Valeriy
Booth, Jean-Paul
Martins, Sofia
Landry, Karine
Douai, David
Cassagne, Valerick
Ключевые слова: plasma physics
gas discharges
Issue Date: Aug-2005
Издатель: EUROPHYSICS LETTERS
Библиографическое описание: Europhys. Lett., 71 (3), pp. 407–411 (2005)
Серия/номер: ;DOI: 10.1209/epl/i2005-10108-1
Краткий осмотр (реферат): Breakdown and extinction curves have been measured for RF capacitive low-pressure discharges in nitrogen and hydrogen at a frequency of 13.56 MHz and discharge gaps between 6 and 25 mm. In particular, the low-pressure, high-voltage region of the extinction curves is reported for the first time. The shape of the extinction curves was found to be similar to that of the breakdown curves. At sufficiently large gaps (L > 10 mm) the RF extinction voltage was found to be multi-valued in the low-pressure region, as is observed for the breakdown voltage. In this region, extinction can occur when the voltage is increased because the width of the two sheaths occupies the whole discharge space.
URI: http://dspace.univer.kharkov.ua/handle/123456789/1710
Appears in Collections:Наукові роботи. Фізико-технічний факультет

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