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Please use this identifier to cite or link to this item: http://dspace.univer.kharkov.ua/handle/123456789/1709

Название: The effect of discharge chamber geometry on the ignition of low-pressure rf capacitive discharges
Авторы: Lisovskiy, V.
Martins, S.
Landry, K.
Douai, D.
Booth, Jean-Paul
Cassagne, V.
Yegorenkov, V.
Ключевые слова: plasma physics
gas discharges
Issue Date: Sep-2005
Библиографическое описание: PHYSICS OF PLASMAS 12, 093505 (2005)
Серия/номер: ;DOI: 10.1063/1.2033748
Краткий осмотр (реферат): This paper reports measured and calculated breakdown curves in several gases of rf capacitive discharges excited at 13.56 MHz in chambers of three different geometries: parallel plates surrounded by a dielectric cylinder (“symmetric parallel plate”), parallel plates surrounded by a grounded metallic cylinder (“asymmetric parallel plate”), and parallel plates inside a much larger grounded metallic chamber (“large chamber”). The breakdown curves for the symmetric chamber have a multivalued section at low pressure. For the asymmetric chamber the breakdown curves are shifted to lower pressures and rf voltages, but the multivalued feature is still present. At higher pressures the breakdown voltages are much lower than for the symmetric geometry. For the large chamber geometry the multivalued behavior is not observed. The breakdown curves were also calculated using a numerical model based on fluid equations, giving results that are in satisfactory agreement with the measurements.
URI: http://dspace.univer.kharkov.ua/handle/123456789/1709
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