The effect of discharge chamber geometry on the ignition of low-pressure rf capacitive discharges
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Дата
2005-09
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Видавець
PHYSICS OF PLASMAS
Анотація
This paper reports measured and calculated breakdown curves in several gases of rf capacitive discharges excited at 13.56 MHz in chambers of three different geometries: parallel plates surrounded by a dielectric cylinder (“symmetric parallel plate”), parallel plates surrounded by a
grounded metallic cylinder (“asymmetric parallel plate”), and parallel plates inside a much larger grounded metallic chamber (“large chamber”). The breakdown curves for the symmetric chamber have a multivalued section at low pressure. For the asymmetric chamber the breakdown curves are shifted to lower pressures and rf voltages, but the multivalued feature is still present. At higher pressures the breakdown voltages are much lower than for the symmetric geometry. For the large chamber geometry the multivalued behavior is not observed. The breakdown curves were also calculated using a numerical model based on fluid equations, giving results that are in satisfactory
agreement with the measurements.
Опис
Ключові слова
plasma physics, gas discharges
Бібліографічний опис
PHYSICS OF PLASMAS 12, 093505 (2005)