Electron drift velocity in argon, nitrogen, hydrogen, oxygen and ammonia in strong electric fields determined from rf breakdown curves
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Дата
2006-02
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Видавець
JOURNAL OF PHYSICS D: APPLIED PHYSICS
Анотація
We report measurements of the breakdown curves for low-pressure rf capacitive
discharges in nitrogen, hydrogen, argon, oxygen and ammonia. The electron drift
velocity in these gases was deduced, as a function of reduced electric field, from
the low-pressure turning points of the breakdown curves. The equation for rf
breakdown proposed by Kihara (1952 Rev. Mod. Phys. 24 52) allows the position of both the turning point and the breakdown curve minimum to be calculated from the transport properties of each gas. Therefore we propose a new technique to determine the electron drift velocity from the position of the rf breakdown curve minima. We have determined the drift velocity in the range E/p = 52–1324 Vcm−1 Torr−1 for nitrogen, E/p = 33–720 Vcm−1 Torr−1 for argon, E/p = 32–713 Vcm−1 Torr−1 for ammonia, E/p = 32–550 Vcm−1 Torr−1 for hydrogen and E/p = 69–1673 Vcm−1 Torr−1 for oxygen.
Опис
Ключові слова
plasma physics, gas discharges
Бібліографічний опис
J. Phys. D: Appl. Phys. 39 (2006) 660–665