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Please use this identifier to cite or link to this item: http://dspace.univer.kharkov.ua/handle/123456789/1705

Название: A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactor
Авторы: Lisovskiy, V.
Booth, Jean-Paul
Landry, K.
Douai, D.
Cassagne, V.
Yegorenkov, V.
Ключевые слова: plasma physics
gas discharges
Issue Date: Oct-2006
Издатель: http://www.edpsciences.org/epjap
Библиографическое описание: Eur. Phys. J. Appl. Phys. 36, 177–182 (2006)
Серия/номер: ;DOI: 10.1051/epjap:2006116
Краткий осмотр (реферат): We propose a new technique for evaluating the RF voltage across the electrodes of low-pressure capacitively-coupled plasma reactors when direct measurements are not possible. It is based on determining the coordinates of the turning point in the RF breakdown curve and using known values of the electron drift velocity for the gas. The results are in good agreement with those obtained by direct measurements at the driven electrode. Furthermore it allows RF breakdown curves to be determined for different frequencies, giving results that are physically reasonable (coincidence of right-hand branches) and in agreement with other published results. The technique for determining RF voltage we proposed is valid when there is no discharge plasma between electrodes (e.g., before gas breakdown), as well as for negligibly small discharge currents (before extinction of the weak-current discharge mode).
URI: http://dspace.univer.kharkov.ua/handle/123456789/1705
Appears in Collections:Наукові роботи. Фізико-технічний факультет

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