Similarity law for rf breakdown
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Дата
2008-04
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Видавець
www.epl journal.org
Анотація
This paper demonstrates that the similarity law for the rf gas breakdown has the
form Urf =F(p ·L, L/R, f ·L)(where Urf is the rf breakdown voltage, p is the gas pressure, L and R are the length and diameter of the discharge tube, respectively, f is the frequency of the rf
electric field). It means that two rf breakdown curves registered for narrow inter-electrode gaps or in geometrically similar tubes and depicted in the Urf (p ·L) graph will coincide only when the condition f ·L = const is met. This similarity law follows from the rf gas breakdown equation and
it is well supported by the results of measurements.
Опис
Ключові слова
plasma physics, gas discharges
Бібліографічний опис
Europhysics Letters, 82 (2008) 15001