Radial structure of low pressure rf capacitive discharges
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Дата
2010-02
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Видавець
journal homepage: www.elsevier.com/locate/vacuum
Анотація
This paper studies the glow intensity distribution of the discharge plasma against the tube radius and reports the radial profiles of electron temperature and plasma concentration in the rf capacitive discharge
registered with a Langmuir probe. An abrupt increase of electron temperature and glow intensity near the tube wall in the weak-current a-mode of the rf capacitive discharge is revealed, the radial distribution of plasma concentration and ion flow to the electrodes possessing a maximum near the radial sheath boundary. In the g-mode of the rf capacitive discharge the electron temperature decrease in the total
plasma volume leads to an electric field weakening and the peak of the glow intensity near the tube wall vanishes. The radial sheath thickness in the a-mode of the rf capacitive discharge obtained with 2D
simulation experiences pulsations during the rf field period, the changing radial electric field heating electrons and increasing the plasma concentration near the boundary of the radial sheath.
Опис
Ключові слова
plasma physics, gas discharges
Бібліографічний опис
Vacuum 84 (2010) 782–791