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Browsing by Author Booth, Jean-Paul

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Showing results 1 to 16 of 16
PreviewIssue DateTitleAuthor(s)
Vacuum_2008_Etching_Cleaning_NF3.pdf.jpgNov-2007Applying RF current harmonics for end-point detection during etching multi-layered substrates and cleaning discharge chambers with NF3 dischargeLisovskiy, V.; Booth, Jean-Paul; Landry, K., et al
IEEE_Trans_Plasma_Sci_2007.pdf.jpgApr-2007The Effect of Discharge Chamber Geometry on the Characteristics of Low-Pressure RF Capacitive DischargesLisovskiy, V.; Booth, Jean-Paul; Landry, K., et al
PhysPlasmas_12_093505_RF_Break.pdf.jpgSep-2005The effect of discharge chamber geometry on the ignition of low-pressure rf capacitive dischargesLisovskiy, V.; Martins, S.; Landry, K., et al
J_Phys_D_06_Vdr.pdf.jpgFeb-2006Electron drift velocity in argon, nitrogen, hydrogen, oxygen and ammonia in strong electric fields determined from rf breakdown curvesLisovskiy, V.; Booth, Jean-Paul; Landry, K., et al
J_Phys_D_06_Vdr_N2O.pdf.jpgApr-2006Electron drift velocity in N2O in strong electric fields determined from rf breakdown curvesLisovskiy, V.; Booth, Jean-Paul; Landry, K., et al
J_Phys_D_05_NH3.pdf.jpgMar-2005Electron drift velocity in NH3 in strong electric fields determined from rf breakdown curvesLisovskiy, Valeriy; Martins, Sofia; Landry, Karine, et al
J_Phys_D_10_Vdr_SF6.pdf.jpgSep-2010Electron drift velocity in SF6 in strong electric fields determined from rf breakdown curvesLisovskiy, V.; Yegorenkov, V.; Booth, Jean-Paul, et al
J_Phys_D_07_Vdr_SiH4.pdf.jpgMay-2007Electron drift velocity in silane in strong electric fields determined from rf breakdown curvesLisovskiy, V.; Booth, Jean-Paul; Landry, K., et al
Europhys_Lett_2005_Extinction.pdf.jpgAug-2005Extinction of RF capacitive low-pressure dischargesLisovskiy, Valeriy; Booth, Jean-Paul; Martins, Sofia, et al
Europhys_Lett_2007_2F.pdf.jpgOct-2007Low-pressure gas breakdown in dual-frequency RF electric fields in nitrogenLisovskiy, V.; Booth, Jean-Paul; Landry, K., et al
PhysPlasmas_13_103505_2006_N2O_Modes.pdf.jpgOct-2006Modes and the alpha-gamma transition in rf capacitive discharges in N2O at different rf frequenciesLisovskiy, V.; Booth, Jean-Paul; Landry, K., et al
PSST_2008_RF_2F.pdf.jpgMar-2008Modes of low-pressure dual-frequency (27/2 MHz) discharges in hydrogenLisovskiy, V.; Booth, Jean-Paul; Landry, K., et al
J_Phys_D_07_SF6.pdf.jpgNov-2007Modes of rf capacitive discharge in low-pressure sulfur hexafluorideLisovskiy, V.; Booth, Jean-Paul; Jolly, J., et al
J_Phys_D_07_NF3_SiH4.pdf.jpgOct-2007Rf discharge dissociative mode in NF3 and SiH4Lisovskiy, V.; Booth, Jean-Paul; Landry, K., et al
Europhys.Lett_2008_RF_Similarity.pdf.jpgApr-2008Similarity law for rf breakdownLisovskiy, V.; Booth, Jean-Paul; Landry, K., et al
Eur_Phys_ J_ AP_2006.pdf.jpgOct-2006A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactorLisovskiy, V.; Booth, Jean-Paul; Landry, K., et al
Showing results 1 to 16 of 16

 

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